Medium-temperature Water-cooled chiller(10–30 °C)

Features

A dedicated chiller for semiconductor manufacturing processes, designed to achieve optimal energy efficiency and high-precision temperature control.
Available in an ambient temperature model compatible with non-fluorocarbon and low-GWP refrigerants.

Specifications

Cooling Capacity：5.0kW
Operating Temperature Range：5℃～60℃
Temperature Control Accuracy：±0.1
Dimensions(W × D × H)：270mm×910mm×1414mm

Features

This chiller offers high cooling capacity and precise temperature control within a 15–25°C range.

Specifications

Cooling Capacity：70.0kW
Operating Temperature Range：15℃～25℃
Temperature Control Accuracy：±1.5
Dimensions(W × D × H)：1500mm×1080mm×1725mm

Features

This Water-cooled chiller provides precise temperature control within a 15–25°C range and supports energy-saving operation via inverter control.

Specifications

Cooling Capacity：4.3kW～18kW
Operating Temperature Range：15℃～25℃
Temperature Control Accuracy：±0.2
Dimensions(W × D × H)：670mm×806mm×1545mm

Features

This Water-cooled chiller provides precise temperature control in the 10–80°C range. It features a 2-channel configuration capable of supplying two circuits with a single unit and supports ultrapure water applications.

Specifications

Cooling Capacity：2.32kW
Operating Temperature Range：10℃～80℃
Temperature Control Accuracy：±0.2
Dimensions(W × D × H)：675mm×735mm×1440mm

Features

This Water-cooled chiller provides precise temperature control in the 0–50°C range. It features a 2-channel configuration capable of supplying two circuits with a single unit.

Specifications

Cooling Capacity：0.4～6.0kW
Operating Temperature Range：0℃～50℃
Temperature Control Accuracy：±0.2
Dimensions(W × D × H)：770mm×1000mm×1905mm