New Product Release: High-Performance Chiller for Semiconductor Manufacturing Processes (Ambient Temperature Model)
We are pleased to announce the launch of the SCS-105W Series (Ambient Temperature Model), a new high-performance chiller designed specifically for semiconductor processes.
Developed for semiconductor manufacturing equipment, this advanced chiller delivers optimal energy-saving operation and high-precision liquid temperature control.
In addition, environmentally friendly models using non-fluorocarbon refrigerants and low-GWP refrigerants are available to support global warming reduction initiatives.
Features
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1.Optimal Energy-Saving Operation
Equipped with inverter compressor control and proprietary low-load capacity control technology, the system optimizes operation according to load conditions to achieve excellent energy efficiency. -
2.Compliance with Refrigerant Regulations (Global Warming Countermeasures)
To reduce environmental impact, the SCS-105W Series is available in both non-fluorocarbon refrigerant models and low-GWP refrigerant models. -
3.Supports Dual-Channel (2ch) Configuration
With a slim width of only 270 mm, the compact design minimizes installation space requirements.
The unit also supports dual-channel (2ch) configurations for flexible system integration. -
4.High-Precision Liquid Temperature Control
Our proprietary technology quickly detects load fluctuations and controls refrigerant capacity before liquid temperature changes occur, ensuring highly precise temperature stability.
Applications
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・Dry etching equipment for power semiconductors
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・Plasma CVD equipment
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・Other semiconductor process equipment
For more information, please feel free to contact us.
Specifications
| Product Name | High-Performance Chiller for Semiconductor Manufacturing Processes (Ambient Temperature Model) |
|---|---|
| Model Number | SCS-105WSeries |
| Dimensions | 270mm×910mm×1414mm (W×D×H) |
| Cooling Capacity | 5.0kW |